Stewart, M., Lepadatu, S., McCartney, L. N., Cain, M. G., Wright, L., Crain, J., Newns, D. M. and Martyna, G. J. (2015) Electrode size and boundary condition independent measurement of the effective piezoelectric coefficient of thin films. APL Materials, 3 (2). 026103.
Full text not available from this repository.
Official URL: http://dx.doi.org/10.1063/1.4907954
The determination of the piezoelectric coefficient of thin films using interferometry is hindered by bending contributions. Using finite element analysis (FEA) simulations, we show that the Lefki and Dormans approximations using either single or double-beam measurements cannot be used with finite top electrode sizes. We introduce a novel method for characterising piezoelectric thin films which uses a differential measurement over the discontinuity at the electrode edge as an internal reference, thereby eliminating bending contributions. This step height is shown to be electrode size and boundary condition independent. An analytical expression is derived which gives good agreement with FEA predictions of the step height
|Subjects:||Physical sciences > Physics|
|Schools:||Faculty of Science and Technology > School of Physical Sciences and Computing > Jeremiah Horrocks Institute|
|Deposited By:||Nuala Jones|
|Deposited On:||08 Apr 2015 13:50|
|Last Modified:||28 Feb 2017 14:46|
Downloads per month over past year
Downloads for past 30 days
Repository Staff Only: item control page