The inverse solution of the atomic mixing equations by an operator-splitting method

Abstract

The quantification problem of recovering the original material distribution from secondary ion mass spectrometry (SIMS) data is considered in this paper. It is an inverse problem, is ill-posed and hence it requires a special technique for its solution. The quantification problem is essentially an inverse diffusion or (classically) a backward heat conduction problem. In this paper an operator-splitting method (that is proposed in a previous paper by the first author for the solution of inverse diffusion problems) is developed for the solution of the problem of recovering the original structure from the SIMS data. A detailed development of the quantification method is given and it is applied to typical data to demonstrate its effectiveness.